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Shimadzu Korea Vacuum Equiment Co., Ltd.


BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-203 공냉
  • TMP-203 수랭
  • TMP-303 공냉
  • TMP-303 수랭
  • TMP-403 공냉
  • TMP-403 수랭
  • TMP-803 공냉
  • TMP-203 수랭
  • TMP-1003 공냉
  • TMP-1004 공냉
TMP-203 수냉
Rotor coating None Coated
Applicable power supply EI-S04M
Inlet flange VG100 / ICF152 / ISO100B / ISO100C
Outlet flange KF25
Cooling method Water cooled
Ultimate pressure (after baking) Pa (Torr) 10-8 Pa order 10-7 Pa order
Maximum inlet pressure during
continuous operation(N2)
200 Pa
Maximum outlet pressure during
continuous operation
400 Pa
Pumping speed N2 190 L/s
He 140 L/s
H2 120 L/s
Compression ratio N2 1×(109)
He 6×(104)
H2 4×(103)
Rated rotation speed 50000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120 °C or lower
Vibration, measured by the Shimadzu method Less than 0.012 μm (single amplitude)
Recommended purge gas flowrate 20 to 30 mL/min
Recommended pumping speed of backing
vacuum pump during gas purging
200 L/min or higher
Operational ambient temperature range Operation: 0 °C to 40 °C /
Storage: -25 °C to 70 °C
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ˚C
Weight 9 kg