SHIMADZU Excellence in science

Shimadzu Korea Vacuum Equiment Co., Ltd.

PRODUCTINDUSTRIAL MACHINERY

BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-203 공냉
  • TMP-203 수랭
  • TMP-303 공냉
  • TMP-303 수랭
  • TMP-403 공냉
  • TMP-403 수랭
  • TMP-803 공냉
  • TMP-203 수랭
  • TMP-1003 공냉
  • TMP-1004 공냉
TMP-303 공냉
TMP TMP-303M TMP-303MC
Rotor coating None Coated
Applicable power supply EI-S04M
Inlet flange VG100 / ICF152 / ISO100B / ISO100C
Outlet flange KF25
Cooling method Air cooled
Ultimate pressure (after baking) Pa (Torr) 10-8 Pa order 10-7 Pa order
Maximum inlet pressure during continuous operation(N2) 1.3 Pa
Maximum outlet pressure during continuous operation 40 Pa
Pumping speed N2 320 L/s
He 340 L/s
H2 320 L/s
Compression ratio N2 1×(109)
He 8×(104)
H2 1×(104)
Rated rotation speed 45000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120˚C or lower
Vibration, measured by the Shimadzu method Less than 0.012µm(single amplitude)
Recommended purge gas flowrate 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 200 L/min or higher
Operational ambient temperature range Operation: 0˚C to 40˚C /
Storage: -25˚C to 70˚C
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Weight 14 kg
제품문의
위로