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Shimadzu Korea Vacuum Equiment Co., Ltd.


BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-203 공냉
  • TMP-203 수랭
  • TMP-303 공냉
  • TMP-303 수랭
  • TMP-403 공냉
  • TMP-403 수랭
  • TMP-803 공냉
  • TMP-203 수랭
  • TMP-1003 공냉
  • TMP-1004 공냉
TMP-403 공냉
Rotor coating None Coated
Applicable power supply EI-S04M
Inlet flange VG150 / ICF203 / ISO160B / ISO160C
Outlet flange KF25
Cooling method Air cooled
Ultimate pressure (after baking) Pa (Torr) 10-8 Pa order 10-7 Pa order
Maximum inlet pressure during
continuous operation (N2)
1.3 Pa
Maximum outlet pressure during
continuous operation
40 Pa
Pumping speed N2 420 L/s
He 360 L/s
H2 340 L/s
Compression ratio N2 1×(109)
He 8×(104)
H2 1×(104)
Rated rotation speed 45000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120˚C or lower
Vibration, measured by the Shimadzu method Less than 0.012µm (single amplitude)
Recommended purge gas flowrate 20 to 30mL/min
Recommended pumping speed of backing
vacuum pump during gas purging
200 L/min or higher
Operational ambient temperature range Operation:0˚C to 40˚C /
Storage: -25˚C to 70˚C
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Weight 14 kg