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Shimadzu Korea Vacuum Equiment Co., Ltd.

PRODUCTINDUSTRIAL MACHINERY

BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-203 공냉
  • TMP-203 수랭
  • TMP-303 공냉
  • TMP-303 수랭
  • TMP-403 공냉
  • TMP-403 수랭
  • TMP-803 공냉
  • TMP-203 수랭
  • TMP-1003 공냉
  • TMP-1004 공냉
TMP-803 수냉
TMP TMP-803LM(0) TMP-803LMC(0)
Rotor coating None Coated
Applicable power supply EI-R04M
Inlet flange VG150 / ICF203 / ISO160B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure (after baking) Pa (Torr)
10-9 Pa order 10-8 Pa order
Maximum inlet pressure during
continuous operation (N2)
400 Pa
Maximum outlet pressure during
continuous operation
665 Pa
Pumping speed N2 800 L/s
He 800 L/s
H2 700 L/s
Compression ratio N2 1×(109)
He 8×(104)
H2 4×(103)
Rated rotation speed 35000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120˚C or lower
Vibration, measured by the Shimadzu method Less than 0.01 µm (single amplitude)
Recommended purge gas flowrate 20 to 30 mL/min
Recommended pumping speed of backing
vacuum pump during gas purging
500 L/min or higher
Operational ambient temperature range Operation:0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ˚C
Weight 33 kg
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