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Shimadzu Korea Vacuum Equiment Co., Ltd.

PRODUCTINDUSTRIAL MACHINERY

BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-1303
  • TMP-1503
  • TMP-2203
  • TMP-2804
  • TMP-3304
  • TMP-3804
  • TMP-4304
TMP-2203
TMP TMP-2203LM(0) TMP-2203LMC(0)
Rotor coating None Coated
Applicable power supply EI-R04M
Inlet flange VG250 / ICF305 / ISO250B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure (after baking) Pa (Torr) 10-8 Pa order 10-7 Pa order
Maximum flowrate of Ar gas 1300 mL/min 2000 mL/min
Maximum inlet pressure during
continuous operation (N2)
40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed N2 2140 L/s
He 2000 L/s
H2 1350 L/s
Compression ratio N2 1.4×(108)
He 1×(104)
H2 1×(103)
Rated rotation speed 24600 rpm
Startup time Within 11 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120 ˚C or lower
Vibration, measured by the Shimadzu method Less than 0.01 µm (single amplitude)
Recommended purge gas flowrate 20 to 30 mL/min
Recommended pumping speed of backing
vacuum pump during gas purging
800 L/min or higher
Operational ambient temperature range Operation: 0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ˚C
Weight 59 kg
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