SHIMADZU Excellence in science

Shimadzu Korea Vacuum Equiment Co., Ltd.


BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-1303
  • TMP-1503
  • TMP-2203
  • TMP-2804
  • TMP-3304
  • TMP-3804
  • TMP-4304
Rotor coating Coated
Applicable power supply EI-R04M
Inlet flange VG350
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure (after baking) Pa (Torr) 10-7 Pa order
Maximum flowrate of Ar gas 1900 mL/min 2800 mL/min
Maximum inlet pressure during
continuous operation (N2)
40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed N2 4400 L/s
He -
H2 2600 L/s
Compression ratio N2 1×(109) min
He 1×(105)
H2 6×(103)
Rated rotation speed 24000 rpm
Startup time Within 18 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120 ˚C or lower
Vibration, measured by the Shimadzu method Less than 0.01 µm (single amplitude)
Recommended purge gas flowrate 30 mL/min
Recommended pumping speed of backing
vacuum pump during gas purging
1500 L/min or higher
Operational ambient temperature range Operation: 0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ˚C
Weight 105 kg