SHIMADZU Excellence in science

Shimadzu Korea Vacuum Equiment Co., Ltd.


BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-1303
  • TMP-1503
  • TMP-2203
  • TMP-2404
  • TMP-2804
  • TMP-3304
  • TMP-3804
  • TMP-4304
Rotor coating None Coated
Applicable power supply EI-R04M EI-R04MT
Inlet flange VG250 / ISO250B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure (after baking) Pa (Torr)
10-7 Pa order
Maximum flowrate of Ar gas 2100 mL/min 2800 mL/min 1700 mL/min 2250 mL/min
Maximum inlet pressure during
continuous operation (N2)
40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed N2 2100 L/s
He 2240 L/s
H2 1770 L/s
Compression ratio N2 1×(109) min.
He 7×(104)
H2 3×(103)
Rated rotation speed 27000 rpm
Startup time Within 11 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120 ˚C or lower
Vibration, measured by the Shimadzu method Less than 0.01 µm (single amplitude)
Recommended purge gas flowrate 20 to 100 mL/min
Recommended pumping speed of backing
vacuum pump during gas purging
1300 L/min or higher
Operational ambient temperature range Operation: 0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 mpa
Temperature 5 to 25 ˚C
Weight 70 kg