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Shimadzu Korea Vacuum Equiment Co., Ltd.

PRODUCTINDUSTRIAL MACHINERY

BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-V1704
  • TMP-V2304
  • TMP-V2804
  • TMP-V3304
  • TMP-X4304, X3804
TMP-V1704
TMP TMP-V1704LM
Inlet flange VG200 / ISO200B
Outlet flange KF40
Cooling Method Water Cooled
Mass 60 kg
Ultimate pressure (after baking) 10-7 Pa order
Maximum flow quantity(Ar) 600 mL/min
Maximum allowable inlet pressure
(N2 continuous exhaust)
4.5 Pa
Maximum allowable outlet pressure
(N2 continuous exhaust)
20 Pa
Pumping speed
N2 1400 L/s
Ar 1350 L/s
Compression ratio N2 1×(108) or more
He 5×(103)
H2 9×(102)
Rated speed 33,700 rpm
Start-up time 9 minutes or less
Mounting position In any desired direction
Vibration level
(by Shimadzu's method)
0.01 μm or less (0-peak)
Admissible pumping speed of backing vacuum pump in case of gas purge 1500 L/min or more
Display LED POWER / STATUS / ROTATION / NET
Communication Contact REMOTE(D-sub 37 pin female, Screw lock size M2.6)
Input : START / STOP / RESET / LOW SPEED
Output : ROTATION / ACC. / BRAKE / NORMAL
            REMOTE / ALARM / WARNING / CONNECTION
Serial RS-232C / RS-485
(D-sub 9 pin male, Screw lock size M2.6)
Speed variation Speed is variable between 25% and 100% of the rated
speed (set as 0.1%).
Water Flow rate 3 to 4 L/min
Pressure 0.2 to 0.4 MPa
Temperature 19 to 30 ℃ (above dew point)
Admissible ambient
magnetic field
Radial direction 3 mT
Axial direction 15 mT
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