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Shimadzu Korea Vacuum Equiment Co., Ltd.

PRODUCTINDUSTRIAL MACHINERY

BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-V1704
  • TMP-V2304
  • TMP-V2804
  • TMP-V3304
  • TMP-X4304, X3804
TMP-V3304
TMP TMP-V3304LM (F) TMP-V3304LMC (F)
Inlet flange VG300 / ISO320B / VG350
Outlet flange KF40
Cooling Method Water Cooled
Mass 94 kg
Ultimate pressure (after baking) 10-7 Pa order
Maximum flow quantity Ar 1500mL/min 1900mL/min
N2 2750mL/min 2750mL/min
Maximum allowable inlet pressure 7 Pa
Maximum allowable outlet pressure 270 Pa
Pumping speed N2 3200 L/s
Ar 3100 L/s
Compression ratio N2 1×(109) or more
He 1×(105)
H2 6×(103)
Rated speed 27,600 rpm
Start-up time 16 minutes or less
Mounting position In any desired direction
Vibration level
(by Shimadzu's method)
0.01 μm or less (0-peak)
Recommended pumping speed of
backing pump in case of gas purge
1500 L/min or more
Display LED POWER / STATUS / ROTATION / NET
Communication Contact REMOTE (D-sub 37 pin female, Screw lock size M2.6)
Input : START / STOP / RESET / LOW SPEED
Output : ROTATION / ACC. / BRAKE / NORMAL REMOTE / ALARM /
            WARNING / CONNECTION
Serial RS-232C / RS-485
(D-sub 9 pin male, Screw lock size M2.6)
Speed variation Speed is variable between 25% and 100% of the
rated speed (set as 0.1%)
Water Flow rate 3 to 4 L/min
Pressure 0.2 to 0.4 Mpa
Temperature 19 to 30 ℃ (above dew point)
Admissible ambient
magnetic field
Radial direction 3 mT
Axial direction 15 mT
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