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Shimadzu Korea Vacuum Equiment Co., Ltd.

PRODUCTINDUSTRIAL MACHINERY

BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-V1704
  • TMP-V2304
  • TMP-V2804
  • TMP-V3304
  • TMP-X4304, X3804
TMP-X4304, X3804
TMP TMP-X4304LM TMP-X3804LM
Inlet flange VG350 VG300
Outlet flange KF40
Mass 135 kg (Included fixed plate) 145 kg (Included fixde plate)
Ultimate pressure
(after baking)
10-7 Pa order
Maximum flow quantity 30 mL/min
(depends on the gas type, valve temperature)
Maximum allowable outlet pressure 270 Pa
Pumping speed N2 4400 L/s 3800 L/s
Ar 4200 L/s 3400 L/s
H2 2600 L/s 2500 L/s
Compression ratio N2 1×(109) or more
He 3×(104)
H2 2×(103)
Rated speed 24000 rpm
Start-up time 18 mimutes or less
Mounting position Vertical
Vibration level
(by Shimadzu's method)
0.01μm or less (0-peak)
Admissible flow rate of purge gas 30 mL/min
Admissible pumping speed of
backing pump in case of gas purge
1500 L/min or more
Display LED POWER / ROTATION / TEMP.CONTROL / ALARM
Communication Contact REMOTE (D-sub 25 pin female, Screw lock size : UNC 4-40)
Input : START / STOP / RESET / LOW SPEED
Output : ROTATION / NORMAL / ACCELERATION / BRAKE / REMOTE /
            TEMP.STABLE /ALARM / WARNING
Serial RS-232C / RS-485
Speed variation Speed is variable between 25 % and 100 % of the rated speed
(set as 0.1 %)
Admissible ambient
magnetic field
Radial direction 3 mT
Axial direction 15 mT
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