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Shimadzu Korea Vacuum Equiment Co., Ltd.


BEST for Semi & FPD Customers

Turbo Molecular Pump

  • TMP-V1704
  • TMP-V2304
  • TMP-V2804
  • TMP-V3304
  • TMP-X1205, X1605
  • TMP-X4304, X3804
TMP-X1205, X1605
Rotor coating None None
Applicable power supply ONBOARD TYPE
Inlet flange VG150 / ISO160B VG200 / VG250
ISO200B / ISO250B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure (after baking) Pa (Torr)
10-7 Pa order
Maximum inlet pressure during 28 Pa
Maximum outlet pressure during continuous operation 266 Pa
Pumping speed N2 1080 L/s, 950 L/s 1400L/s, 1490L/s
Ar 1020 L/s, 890 L/s 1330L/s, 1420L/s
H2 710 L/s, 680 L/s 750L/s, 780L/s
Compression ratio N2 2×(108) min.
H2 8×(102)
Rated rotation speed 37200 rpm
Startup time Within 8 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120 ˚C or lower
Vibration, measured by the Shimadzu method Less than 0.01 µm (single amplitude)
Recommended purge gas flowrate 30 mL/min
Admissible pumping speed of vacking
vacuum pump in case of gas purge
600 L/min or more
Operational ambient temperature range Operation: 0 ˚C to 40 ˚C /
Storage: -25 ˚C to 70 ˚C
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 34 L/min
Pressure 0.2 to 0.5 mpa
Temperature 19 to 30 ˚C
Weight 43 kg