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Shimadzu Korea Vacuum Equiment Co., Ltd.

PRODUCTINDUSTRIAL MACHINERY

BEST for Semi & FPD Customers

Helium Leak Detector

  • MSE-2000S/2010S
  • MSE-2001S/2011S
  • MSE-3200S/3210S
  • MSE-4200S
  • MLI-2001S
MSE-2000S
Sensitivity 10-13 ~ 100 Pa·m3/s [He]
Analyzer Tube 270˚ magnetic deflecting type (Flux density : 0.17T)
Yttria-coated iridium filament (2 pcs)
Automatic tuning sensitivity calibration with temperature compensation
Vacuum System Molecular drag pump specially designed for leak detector (Structure of exhaust 70L/s)
Rotary vacuum pump specially designed for leak detector (30L/min 50Hz)
Pirani gage : provided in two lines
Test port Maximum pressure 1000Pa
Connection port : NW25KF
Wight Main unit : approx, 45Kg
Power Requirements Specify one of the following when placing an order :
100/110/115/120/200/220/230/240VAC±10% single phase,
50/60Hz
Input/output Recorder output
DC 0~1.0V (exponnent)
DC 0~1.2V (mantissa)
RS-232C interface
EXT-UNIT interface (External Unit)

MSE-2010S
Sensitivity 10-13 ~ 100 Pa·m3/s [He]
Analyzer Tube 270˚ magnetic deflecting type (Flux density : 0.17T)
Yttria-coated iridium filament (2 pcs)
Automatic tuning sensitivity calibration with temperature compensation
Vacuum System Molecular drag pump specially designed for leak detector (Structure of exhaust 70L/s)
Rotary vacuum pump specially designed for leak detector (300L/min 50Hz)
Pirani gage : provided in two lines
Test port Maximum pressure 1000Pa
Connection port : NW25KF
Wight Main unit : approx, 100Kg
Power Requirements Specify one of the following when placing an order :
100/110/115/120/200/220/230/240VAC±10% single phase,
50/60Hz
Input/output Recorder output
DC 0~1.0V (exponnent)
DC 0~1.2V (mantissa)
RS-232C interface
EXT-UNIT interface (External Unit)
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