SHIMADZU Excellence in science

Shimadzu Korea Vacuum Equiment Co., Ltd.


BEST for Semi & FPD Customers

Helium Leak Detector

  • MSE-2000S/2010S
  • MSE-2001S/2011S
  • MSE-3200S/3210S
  • MSE-4200S
  • MLI-2001S
Sensitivity 10-13 ~ 100 Pa·m3/s [He]
Leak rate for judgment 2.5×10-10Pa·m3/s [He]
Tact time 6 seconds order ( Vented with dry nitrogen)
Analyzer Tube 270˚ magnetic deflecting type (Flux density : 0.17T)
Yttria-coated iridium filament (2 pcs)
Automatic sensitivity calibration with temperature compensation
Vacuum System Molecular drag pump specially designed for leak detector (Structure of exhaust 70L/s)
Oil-sealed rotary vacuum pump (fore vacuum pump) (30L/min 50Hz)
Oil-sealed rotary vacuum pump (roughing vacuum pump) (300L/min 50Hz)
Pirani gage : provided in two lines
Test Chamber Maximum pressure 2000Pa
Connection port : NW25KF
Wight Main unit : approx, 170Kg
Power Requirements 200VAC±10%, three phases, 50/60Hz
Input/output Recorder output
DC 0~1.0V (exponnent)
DC 0~1.2V (mantissa)
RS-232C interface
Printer interface